Output-feedback adaptive control of electrostatic microactuators

  • Authors:
  • Keng-Peng Tee;Shuzhi Sam Ge;Eng Hock Tay

  • Affiliations:
  • Institute for Infocomm Research, A*STAR, Singapore;Department of Electrical & Computer Engineering, National University of Singapore, Singapore;Department of Mechanical Engineering, National University of Singapore, Singapore

  • Venue:
  • ACC'09 Proceedings of the 2009 conference on American Control Conference
  • Year:
  • 2009

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Abstract

Adaptive control is presented for a class of electrostatic micro-actuators with bidirectional drive. The objective is to track a reference trajectory within the air gap without knowledge of the plant parameters. Motivated by practical difficulties in measuring velocity of the moving plate, an output feedback scheme is developed. After transforming the plant into the parametric output feedback form, adaptive observer backstepping is employed to achieve asymptotic output tracking. To prevent contact of the movable plate and the electrodes, asymmetric barrier functions are employed in Lyapunov synthesis. All closed loop signals are ensured to be bounded. A simulation study demonstrates the effectiveness of the proposed control.