Microlens rapid prototyping technique with capability for wide variation in lens diameter and focal length

  • Authors:
  • J. L. Cruz-Campa;M. Okandan;M. L. Busse;G. N. Nielson

  • Affiliations:
  • MEMS Core Technologies, Sandia National Laboratories, 1515 Eubank Blvd. SE, M.S. 1080, Albuquerque, NM 87123, USA;Advanced MEMS, Sandia National Laboratories, 1515 Eubank Blvd. SE, M.S. 1080, Albuquerque, NM 87123, USA;MESAFab Engineering, Sandia National Laboratories, 1515 Eubank Blvd. SE, M.S. 1080, Albuquerque, NM 87123, USA;Advanced MEMS, Sandia National Laboratories, 1515 Eubank Blvd. SE, M.S. 1080, Albuquerque, NM 87123, USA

  • Venue:
  • Microelectronic Engineering
  • Year:
  • 2010

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Abstract

A ''mold-less'' method for rapid prototyping spherical microlenses using the surface tension of a transparent, temperature sensitive polymer is presented. The lens size can be varied with the volume of the polymer dispensed, with a diameter range of 450@mm-4mm. The focal length can be varied with the deposition/curing temperature, and can have values in the range of 2-25mm. Mechanical profilometry and custom software was used to measure the lens profile. Parameters such as curvature, focal length, diameter, contact angle, and F-number were extracted from the measurements. Finally, an empirical model that predicts these variables as a function of temperature and volume deposited is proposed.