Scheduling algorithms for a semiconductor probing facility

  • Authors:
  • June-Young Bang;Yeong-Dae Kim

  • Affiliations:
  • System Engineering Team, Device Solution Business, Samsung Electronics Co., Ltd., Hwasung, Gyeonggi-Do 445-701, Republic of Korea;Department of Industrial Engineering, Korea Advanced Institute of Science and Technology, Yuseong-gu, Daejeon 305-701, Republic of Korea

  • Venue:
  • Computers and Operations Research
  • Year:
  • 2011

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Abstract

This paper focuses on a scheduling problem in a semiconductor wafer probing facility. In the probing facility, wafer lots with distinct ready times are processed on a series of workstations, each with identical parallel machines. We develop a heuristic algorithm for the problem with the objective of minimizing total tardiness of orders. The algorithm employs a bottleneck-focused scheduling method, in which a schedule at the bottleneck workstation is constructed first and then schedules for other workstations are constructed based on the schedule at the bottleneck. For scheduling wafer lots at the bottleneck workstation, we consider prospective tardiness of the lots as well as sequence-dependent setup times required between different types of wafer lots. We also present a rolling horizon method for implementation of the scheduling method on a dynamic situation. The suggested methods are evaluated through a series of computational experiments and results show that the methods work better than existing heuristic methods.