Analysis and modeling of CD variation for statistical static timing
Proceedings of the 2006 IEEE/ACM international conference on Computer-aided design
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
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This project aims to detect the onset of chip failure due to via voiding through monitoring the delays of paths in a chip. The proposed method relates the probability of failure of individual vias to an increase in delay for monitors of the system using data for 65nm technology. The delay increase, as a function of the failure distribution parameters, the path length, gate type, and process variation, has been investigated. An on-chip, ring oscillator-based wearout monitoring circuit is presented. The proposed scheme monitors the delay through a data path using a delay detection circuit (DDC).