Six-DOF micro-manipulator based on compliant parallel mechanism with integrated force sensor

  • Authors:

  • Qiaokang Liang;Dan Zhang;Zhongzhe Chi;Quanjun Song;Yunjian Ge;Yu Ge

  • Affiliations:

  • State Key Laboratories of Robot Sensing Systems, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui, China and Department of Automation, University of Science and Technol ...;Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Ontario, Canada L1H 7K4;Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Ontario, Canada L1H 7K4;State Key Laboratories of Robot Sensing Systems, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui, China;State Key Laboratories of Robot Sensing Systems, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui, China;State Key Laboratories of Robot Sensing Systems, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui, China

  • Venue:
  • Robotics and Computer-Integrated Manufacturing
  • Year:
  • 2011

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Abstract

This paper describes the design of a micro-scale manipulator based on a six-DOF compliant parallel mechanism (CPM), which is featured by piezo-driven actuators and integrated force sensor capable of delivering six-DOF motions with high precision and providing real-time force information for feedback control. Particularly, the position and screw-based Jacobian analyses of the CPM are presented. Then, the compliance model and the workspace evaluation of the CPM are proposed in order to account for the compliance and obtain design guidelines. Finally, the integrated sensor is introduced. The static features of such a mechanism include high positioning accuracy, structural compactness and smooth and continuous displacements.