Full fabrication simulation of 300mm wafer focused on AMHS (automated material handling systems)
AsiaSim'04 Proceedings of the Third Asian simulation conference on Systems Modeling and Simulation: theory and applications
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To reduce the manufacturing cost and promote the producing efficiency, 300mm wafer is increasingly adopted rather than 200mm one in semiconductor industry. In order to use 300mm wafer, it is necessary to have an automated process for 300mm wafer because it's heavy weight and big size. And companies intend to save cost by constructing it. As you know the automated manufacturing process is more influenced by disposition of equipments and way of transmission. In this paper we've carried out the experiments focused on cutting down a producing cost and increasing a producing efficiency according to change the transmission way from one-way to two way In conclusion, the two way is more profitable than one way even if there are many restrictions.