Nonlinear analysis and control of the uncertain micro-electro-mechanical system by using a fuzzy sliding mode control design

Authors:
Her-Terng Yau;Cheng-Chi Wang;Chin-Tsung Hsieh;Ching-Chang Cho
Affiliations:
Department of Electrical Engineering, National Chin-Yi University of Technology, Taichung, Taiwan;Department of Mechanical Engineering, Far East University, Hsin-Shih, Tainan, Taiwan;Department of Electrical Engineering, National Chin-Yi University of Technology, Taichung, Taiwan;Department of Mechanical Engineering, National Cheng-Kung University, Tainan, Taiwan
Venue:
Computers & Mathematics with Applications
Year:
2011

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Abstract

This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (MEMS). To suppress chaotic motion, a robust fuzzy sliding mode controller (FSMC) is designed to turn the chaotic motion into a periodic motion even when the MEMS has system uncertainties.