Novelty detection: a review—part 2: neural network based approaches
Signal Processing
Estimating the Support of a High-Dimensional Distribution
Neural Computation
Focusing on non-respondents: Response modeling with novelty detectors
Expert Systems with Applications: An International Journal
Supporting diagnosis of attention-deficit hyperactive disorder with novelty detection
Artificial Intelligence in Medicine
A virtual metrology system for semiconductor manufacturing
Expert Systems with Applications: An International Journal
Virtual metrology for run-to-run control in semiconductor manufacturing
Expert Systems with Applications: An International Journal
Review: A review of novelty detection
Signal Processing
Hi-index | 12.06 |
Since semiconductor manufacturing consists of hundreds of processes, a faulty wafer detection system, which allows for earlier detection of faulty wafers, is required. statistical process control (SPC) and virtual metrology (VM) have been used to detect faulty wafers. However, there are some limitations in that SPC requires linear, unimodal and single variable data and VM underestimates the deviations of predictors. In this paper, seven different machine learning-based novelty detection methods were employed to detect faulty wafers. The models were trained with Fault Detection and Classification (FDC) data to detect wafers having faulty metrology values. The real world semiconductor manufacturing data collected from a semiconductor fab were tested. Since the real world data have more than 150 input variables, we employed three different dimensionality reduction methods. The experimental results showed a high True Positive Rate (TPR). These results are promising enough to warrant further study.