A MEMS Convective Accelerometer Equipped with On-Chip Facilities for Sensitivity Electrical Calibration

Authors:
Ahmed Amine Rekik;Florence Azaïs;Norbert Dumas;Frederick Mailly;Pascal Nouet
Affiliations:
-;-;-;-;-
Venue:
IMS3TW '11 Proceedings of the 2011 IEEE 17th International Mixed-Signals, Sensors and Systems Test Workshop
Year:
2011

Citing 0
Cited 2

Sensitivity and power modeling of CMOS mems single axis convective accelerometers

Microelectronics Journal
Study of Low-Cost Electrical Test Strategies for Post-Silicon Yield Improvement of MEMS Convective Accelerometers

Journal of Electronic Testing: Theory and Applications

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Abstract

In this paper, we propose an alternate electrical-only strategy to perform both test and calibration of MEMS convective accelerometers' sensitivity. The idea is calibrate device sensitivity through the adjustment of the power dissipated in the heater element. For this, the system is equipped with an on-chip programmable digital pulse modulated generator and an iterative search procedure based on simple impedance measurements is implemented. The method is evaluated through Monte-Carlo simulations considering typical process variations and results are presented to demonstrate the potentialities of the technique.