Generation of Electrically Induced Stimuli for MEMS Self-Test
Journal of Electronic Testing: Theory and Applications
Use of DFT Techniques In Speed Grading a 1GHz+ Microprocessor
ITC '02 Proceedings of the 2002 IEEE International Test Conference
Built-In Self Test of CMOS-MEMS Accelerometers
ITC '02 Proceedings of the 2002 IEEE International Test Conference
Speed Binning with Path Delay Test in 150-nm Technology
IEEE Design & Test
On-Chip Electro-Thermal Stimulus Generation for a MEMS-Based Magnetic Field Sensor
VTS '05 Proceedings of the 23rd IEEE Symposium on VLSI Test
On Correlating Structural Tests with Functional Tests for Speed Binning of High Performance Design
ITC '04 Proceedings of the International Test Conference on International Test Conference
Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS Accelerometer Sensors
VTS '06 Proceedings of the 24th IEEE VLSI Test Symposium
A novel method for test and calibration of capacitive accelerometers with a fully electrical setup
DDECS '08 Proceedings of the 2008 11th IEEE Workshop on Design and Diagnostics of Electronic Circuits and Systems
Characterization and testing of microelectromechnical accelerometers
IMS3TW '08 Proceedings of the 2008 IEEE 14th International Mixed-Signals, Sensors, and Systems Test Workshop
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Microsystem Technologies
IMS3TW '11 Proceedings of the 2011 IEEE 17th International Mixed-Signals, Sensors and Systems Test Workshop
LATW '12 Proceedings of the 2012 13th Latin American Test Workshop - LATW
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In this paper, different strategies for post-silicon yield improvement of MEMS convective accelerometers are explored. A key feature of the proposed strategies is that they can be implemented at low-cost using electrical test equipment since they only rely on the measurement of the relative deviation of Wheatstone bridge impedance due to power dissipation in the heating element. Different electrical test flows are defined that implement either sensitivity binning, sensitivity calibration, or both. Optionally, an additional constraint can be inserted in the test flows in case power consumption performance has also to be satisfied in addition to sensitivity. The efficiency of the different strategies is evaluated and discussed considering a population of 1,000 devices generated through Monte-Carlo simulation. Finally, experimental measurements that validate the calibration principle are presented.