Built-In Self Test of CMOS-MEMS Accelerometers

Authors:
N. Deb;R. D. (Shawn) Blanton
Affiliations:
-;-
Venue:
ITC '02 Proceedings of the 2002 IEEE International Test Conference
Year:
2002

Citing 0
Cited 13

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A Behavioral Model of MEMS Convective Accelerometers for the Evaluation of Design and Calibration Strategies at System Level

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Abstract

A built-in self-test technique for MEMS that is applicable to symmetrical microstructures is described. A combination of existing layout features and additional circuitry is used to make measurements from symmetrically-locatedpoints. In addition to the normal sense output, self-test outputs are used to detect the presence of layout asymmetry that are caused by local, hard-to-detect defects. Simulation results for an accelerometer reveal that our self-test approach is able to distinguish misbehavior resulting from local defects and manufacturing process variations.