Test and Testability of a Monolithic MEMS for Magnetic Field Sensing
Journal of Electronic Testing: Theory and Applications
Generation of Electrically Induced Stimuli for MEMS Self-Test
Journal of Electronic Testing: Theory and Applications
Test Metrics for Analog Parametric Faults
VTS '99 Proceedings of the 1999 17TH IEEE VLSI Test Symposium
Built-In Self Test of CMOS-MEMS Accelerometers
ITC '02 Proceedings of the 2002 IEEE International Test Conference
A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices
VTS '04 Proceedings of the 22nd IEEE VLSI Test Symposium
MEMS Built-In-Self-Test Using MLS
ETS '04 Proceedings of the European Test Symposium, Ninth IEEE
Pseudorandom testing for mixed-signal circuits
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
System-on-Chip Test Architectures: Nanometer Design for Testability
System-on-Chip Test Architectures: Nanometer Design for Testability
Pseudorandom BIST for test and characterization of linear and nonlinear MEMS
Microelectronics Journal
A Parallel Tester Architecture for Accelerometer and Gyroscope MEMS Calibration and Test
Journal of Electronic Testing: Theory and Applications
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Pseudorandom test techniques are widely used for measuring the impulse response (IR) for linear devices and Volterra kernels for nonlinear devices, especially in the acoustics domain. This paper studies the application of pseudorandom functional test techniques to linear and nonlinear MEMS Built-In-Self-Test (BIST). We will first present the classical pseudorandom BIST technique for Linear Time Invariant (LTI) systems which is based on the evaluation of the IR of the Device Under Test (DUT) stimulated by a Maximal Length Sequence (MLS). Then we will introduce a new type of pseudorandom stimuli called the Inverse-Repeat Sequence (IRS) that proves better immunity to noise and distortion than MLS. Next, we will illustrate the application of these techniques for weakly nonlinear, purely nonlinear and strongly nonlinear devices.