Structured design of microelectromechanical systems
DAC '97 Proceedings of the 34th annual Design Automation Conference
A fault simulation methodology for MEMS
DATE '00 Proceedings of the conference on Design, automation and test in Europe
Extending Fault-Based Testing to Microelectromechanical Systems
Journal of Electronic Testing: Theory and Applications - special issue on the European test workshop 1999
Fault Modeling and Fault Simulation in Mixed Micro-Fluidic Microelectronic Systems
Journal of Electronic Testing: Theory and Applications
Test and Testability of a Monolithic MEMS for Magnetic Field Sensing
Journal of Electronic Testing: Theory and Applications
Generation of Electrically Induced Stimuli for MEMS Self-Test
Journal of Electronic Testing: Theory and Applications
On the Integration of Design and Test for Chips Embedding MEMS
IEEE Design & Test
Development of a MEMS Testing Methodology
Proceedings of the IEEE International Test Conference
Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Defect-Oriented Experiments in Fault Modelling and Fault Simulation of Microsystem Components
EDTC '96 Proceedings of the 1996 European conference on Design and Test
A Novel Test Methodology for MEMS Magnetic Micromotors
VTS '99 Proceedings of the 1999 17TH IEEE VLSI Test Symposium
Built-In Self Test of CMOS-MEMS Accelerometers
ITC '02 Proceedings of the 2002 IEEE International Test Conference
On the Use of an Oscillation-Based Test Methodology for CMOS Micro-Electro-Mechanical Systems
Proceedings of the conference on Design, automation and test in Europe
Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems
VTS '02 Proceedings of the 20th IEEE VLSI Test Symposium
Multi-Modal Built-In Self-Test for Symmetric Microsystems
VTS '04 Proceedings of the 22nd IEEE VLSI Test Symposium
A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices
VTS '04 Proceedings of the 22nd IEEE VLSI Test Symposium
MEMS Built-In-Self-Test Using MLS
ETS '04 Proceedings of the European Test Symposium, Ninth IEEE
On-Chip Pseudorandom MEMS Testing
Journal of Electronic Testing: Theory and Applications
On-chip testing of MEMS using pseudo-random test sequences
DTIP '03 Proceedings of the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pseudorandom testing for mixed-signal circuits
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Fabrication of a new micro bio chip and flow cell cytometry system using Bio-MEMS technology
Microelectronics Journal
System-on-Chip Test Architectures: Nanometer Design for Testability
System-on-Chip Test Architectures: Nanometer Design for Testability
Pseudorandom BIST for test and characterization of linear and nonlinear MEMS
Microelectronics Journal
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As predicted by technology roadmaps, embedded micro-electro-mechanical-systems (MEMS) is yet another step in the continuous search for higher levels of integration and miniaturization. MEMS are analog components and the test paradigm is similar to the case of analog and mixed-signal circuits. However, given the fact that they work with signals other than electrical, the test of these embedded parts poses new challenges. In this paper, we will review some recent works in this field and we will present a complete approach to MEMS built-in-self-test (BIST) based on pseudorandom testing.