Evaluation of the Oscillation-based Test Methodology for Micro-Electro-Mechanical Systems

Authors:
V. Beroulle;Y. Bertrand;L. Latorre;P. Nouet
Affiliations:
-;-;-;-
Venue:
VTS '02 Proceedings of the 20th IEEE VLSI Test Symposium
Year:
2002

Citing 0
Cited 6

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Testing digital low-pass filters using oscillation-based test

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Pseudorandom BIST for test and characterization of linear and nonlinear MEMS

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Test Strategies for Electrode Degradation in Bio-Fluidic Microsystems

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An Oscillation-Based Technique for Degradation Monitoring of Sensing and Actuation Electrodes Within Microfluidic Systems

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Abstract

In this paper, the Oscillation-based Test Methodology (OTM) is evaluated in the context of MEMS testing. Both qualitative and quantitative evaluations of fault coverage are discussed and the impact of test on productio yield is addressed. This article also introduces the Lorentz force as a low-cost stimulus for electro-mechanical structures.