Multi-Modal Built-In Self-Test for Symmetric Microsystems

  • Authors:
  • Nilmoni Deb;R. D. (Shawn) Blanton

  • Affiliations:
  • -;-

  • Venue:
  • VTS '04 Proceedings of the 22nd IEEE VLSI Test Symposium
  • Year:
  • 2004

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Abstract

A mathematical model analyzing the efficacy of a built-inself-test technique, applicable to any symmetrical MEMS microstructure,is developed. The model predicts that the BISTtechnique can also be used to characterize a wide range of localmanufacturing variations affecting different regions of thedevice. Model predictions have been validated by simulation.Specifically, it has been shown that by using a suitable modulationscheme, sensitivity to linear etch variation along a particulardirection is improved by nearly 30%.