T7: MEMS: Technology, Design, CAD and Applications

  • Authors:

  • R. Lal;P. R. Apte;K. N. Bhat;G. Bose;S. Chandra;D. K. Sharma

  • Affiliations:

  • Indian Institute of Technology, Bombay, India;Tata Institute of Fundamantal Research, Mumbai, India;Indian Institute of Technology, Madras, India;Indian Institute of Technology, Delhi, India;Indian Institute of Technology, Delhi, India;Indian Institute of Technology, Bombay, India

  • Venue:
  • ASP-DAC '02 Proceedings of the 2002 Asia and South Pacific Design Automation Conference
  • Year:
  • 2002

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Abstract