Hierarchical Design and Test of Integrated Microsystems
IEEE Design & Test
A Design Flow for Micromachined Electromechanical Systems
IEEE Design & Test
Failure modes for stiction in surface-micromachined MEMS
ITC '98 Proceedings of the 1998 IEEE International Test Conference
MEMS fault model generation using CARAMEL
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Particulate Failures for Surface-Micromachined MEMS
ITC '99 Proceedings of the 1999 IEEE International Test Conference
ITC '00 Proceedings of the 2000 IEEE International Test Conference
Multi-Modal Built-In Self-Test for Symmetric Microsystems
VTS '04 Proceedings of the 22nd IEEE VLSI Test Symposium
Design automation for microfluidics-based biochips
ACM Journal on Emerging Technologies in Computing Systems (JETC)
Test Planning and Test Resource Optimization for Droplet-Based Microfluidic Systems
Journal of Electronic Testing: Theory and Applications
Electro-thermal Stimuli for MEMS Testing in FSBM Technology
Journal of Electronic Testing: Theory and Applications
Concurrent testing of digital microfluidics-based biochips
ACM Transactions on Design Automation of Electronic Systems (TODAES)
Multiple fault diagnosis in digital microfluidic biochips
ACM Journal on Emerging Technologies in Computing Systems (JETC)
Testing and Diagnosis of Realistic Defects in Digital Microfluidic Biochips
Journal of Electronic Testing: Theory and Applications
Yield analysis for self-repairable MEMS devices
Analog Integrated Circuits and Signal Processing
Efficient parallel testing and diagnosis of digital microfluidic biochips
ACM Journal on Emerging Technologies in Computing Systems (JETC)
System-on-Chip Test Architectures: Nanometer Design for Testability
System-on-Chip Test Architectures: Nanometer Design for Testability
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The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency of a surfacemicromachinedresonator and accelerometer are presented. For each device, it is shown that misbehaviors resulting from different failure sources can overlap, exhibit dominance and combine to create behavior masking and construction. Such an analysis is essential for developing test and diagnosis methodologies forsurface-micromachined MEMS.