Microsystems testing: an approach and open problems
Proceedings of the conference on Design, automation and test in Europe
CAD Tools for Bridging Microsystems and Foundries
IEEE Design & Test
Industrial Relevance of Analog IFA: A Fact or a Fiction
Proceedings of the IEEE International Test Conference on Driving Down the Cost of Test
Development of a MEMS Testing Methodology
Proceedings of the IEEE International Test Conference
Defect-Oriented Experiments in Fault Modelling and Fault Simulation of Microsystem Components
EDTC '96 Proceedings of the 1996 European conference on Design and Test
Inductive Fault Analysis of MOS Integrated Circuits
IEEE Design & Test
A fault simulation methodology for MEMS
DATE '00 Proceedings of the conference on Design, automation and test in Europe
Extending Fault-Based Testing to Microelectromechanical Systems
Journal of Electronic Testing: Theory and Applications - special issue on the European test workshop 1999
High-Level Fault Modeling in Surface-Micromachined MEMS
Analog Integrated Circuits and Signal Processing
Fault Modeling and Fault Simulation in Mixed Micro-Fluidic Microelectronic Systems
Journal of Electronic Testing: Theory and Applications
Test and Testability of a Monolithic MEMS for Magnetic Field Sensing
Journal of Electronic Testing: Theory and Applications
Generation of Electrically Induced Stimuli for MEMS Self-Test
Journal of Electronic Testing: Theory and Applications
Analysis of Failure Sources in Surface-Micromachined MEMS
ITC '00 Proceedings of the 2000 IEEE International Test Conference
Fault modeling of suspended thermal MEMS
ITC '99 Proceedings of the 1999 IEEE International Test Conference
Particulate Failures for Surface-Micromachined MEMS
ITC '99 Proceedings of the 1999 IEEE International Test Conference
Electro-thermal Stimuli for MEMS Testing in FSBM Technology
Journal of Electronic Testing: Theory and Applications
Built-in-self-test techniques for MEMS
Microelectronics Journal
System-on-Chip Test Architectures: Nanometer Design for Testability
System-on-Chip Test Architectures: Nanometer Design for Testability
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Silicon-compatible micromachining provides a lowcost monolithic solution for the integration of microelectromechanical systems (MEMS). In the last years,CMP (the French MultiProject Wafer Service) hasmade available technological solutions for the fabrication of CMOS-compatible MEMS. Numerous monolithic devices have been fabricated using this service.The inspection of failed devices has allowed the identification of the most typical failure mechanisms anddesign errors for this type of MEMS. This valuable information, together with a detailed analysis of the fabrication processes, is used in this paper to provide a classification of faults in silicon-compatible MEMS whichcan later be used for fault simulation and testing.