A fault simulation methodology for MEMS
DATE '00 Proceedings of the conference on Design, automation and test in Europe
Microsystems testing: an approach and open problems
Proceedings of the conference on Design, automation and test in Europe
Test and Testability of a Monolithic MEMS for Magnetic Field Sensing
Journal of Electronic Testing: Theory and Applications
Generation of Electrically Induced Stimuli for MEMS Self-Test
Journal of Electronic Testing: Theory and Applications
Analog Testing with Time Response Parameters
IEEE Design & Test
Failure modes for stiction in surface-micromachined MEMS
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Defect-Oriented Experiments in Fault Modelling and Fault Simulation of Microsystem Components
EDTC '96 Proceedings of the 1996 European conference on Design and Test
Extending Fault-Based Testing to Microelectromechanical Systems
ETW '99 Proceedings of the 1999 IEEE European Test Workshop
Analysis of Failure Sources in Surface-Micromachined MEMS
ITC '00 Proceedings of the 2000 IEEE International Test Conference
Built-In Self Test of CMOS-MEMS Accelerometers
ITC '02 Proceedings of the 2002 IEEE International Test Conference
Fault modeling of suspended thermal MEMS
ITC '99 Proceedings of the 1999 IEEE International Test Conference
Particulate Failures for Surface-Micromachined MEMS
ITC '99 Proceedings of the 1999 IEEE International Test Conference
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The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.