Fault Modeling and Fault Simulation in Mixed Micro-Fluidic Microelectronic Systems

  • Authors:
  • Hans G. Kerkhoff;Hans P. A. Hendriks

  • Affiliations:
  • MESA+ Research Institute, Testable Design and Test of Microsystems (TDT) Group, P.O. Box 217, 7500 AE Enschede, The Netherlands. H.G.Kerkhoff@el.utwente.nl;MESA+ Research Institute, Testable Design and Test of Microsystems (TDT) Group, P.O. Box 217, 7500 AE Enschede, The Netherlands

  • Venue:
  • Journal of Electronic Testing: Theory and Applications
  • Year:
  • 2001

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Abstract

Developments in electronic/fluidic microsystems are progressing rapidly. The ultimate goal is to deliver products in the 10,000 fluidic reaction-wells range. Exciting applications include massive parallel DNA analysis and automatic drug synthesis. Until now, only functional testing has been used to “guarantee” the quality of micro-fluidic systems after manufacturing.In this paper, defect-oriented test approaches developed in analogue fault modeling and simulation have been used to predict for the first time the faulty behavior of micro-electronic fluidic microsystems. The modeling is targeted for use in complex electronic/fluidic microsystems employing commercial microsystem CAD tools. It enables a measure for the quality of these systems based on the performed (functional) tests and can be a guide for future test-stimuli generation and yield prediction.