Structured design of microelectromechanical systems
DAC '97 Proceedings of the 34th annual Design Automation Conference
Microsystems testing: an approach and open problems
Proceedings of the conference on Design, automation and test in Europe
Development of a MEMS Testing Methodology
Proceedings of the IEEE International Test Conference
Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems
ITC '98 Proceedings of the 1998 IEEE International Test Conference
Defect-Oriented Experiments in Fault Modelling and Fault Simulation of Microsystem Components
EDTC '96 Proceedings of the 1996 European conference on Design and Test
Test Planning and Test Resource Optimization for Droplet-Based Microfluidic Systems
Journal of Electronic Testing: Theory and Applications
Concurrent testing of digital microfluidics-based biochips
ACM Transactions on Design Automation of Electronic Systems (TODAES)
Multiple fault diagnosis in digital microfluidic biochips
ACM Journal on Emerging Technologies in Computing Systems (JETC)
Built-in-self-test techniques for MEMS
Microelectronics Journal
Computer-Aided Design and Test for Digital Microfluidics
IEEE Design & Test
Testing and Diagnosis of Realistic Defects in Digital Microfluidic Biochips
Journal of Electronic Testing: Theory and Applications
Efficient parallel testing and diagnosis of digital microfluidic biochips
ACM Journal on Emerging Technologies in Computing Systems (JETC)
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As stable fabrication processes forMicroElectroMechanical Systems (MEMS) emerge, research efforts shifttowards the design of systems of increasing complexity. The ways inwhich testing is going to be performed for large volume complexdevices embedding MEMS are not known. As in the microelectronicsindustry, the development of cost-effective tests for larger systemsmay well require test stimuli targeting actual faults, developingfault lists and fault models for realistic manufacturing defects andfailure modes, and using fault simulation as a major approach forassessing testability and dependability. In this paper, we illustratehow fault-based testing can be extended to MEMS, both for bulk andsurface micromachining technologies, making possible the reuse ofanalog testing techniques.