Optimization of a simulation for 300mm FAB semiconductor manufacturing

Authors:
DongSik Park;Youngshin Han;Chilgee Lee
Affiliations:
School of Information and Communication Engineering, SungKyunKwan University, Suwon,Kyunggi-do, S. Korea;Division of Multimedia Sungkyul University, Anyang-city, Gyeonggi-do, S. Korea;School of Information and Communication Engineering, SungKyunKwan University, Suwon,Kyunggi-do, S. Korea
Venue:
ICCSA'06 Proceedings of the 2006 international conference on Computational Science and Its Applications - Volume Part V
Year:
2006

Citing 1
Cited 1

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Abstract

Many processes are composed of Bays with equipments. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line.