Model reduction for RF MEMS simulation

  • Authors:
  • David S. Bindel;Zhaojun Bai;James W. Demmel

  • Affiliations:
  • Department of Electrical Engineering and Computer Science, University of California at Berkeley, Berkeley, CA;Department of Computer Science, University of California at Davis, Davis, CA;Department of Electrical Engineering and Computer Science and, Department of Mathematics, University of California at Berkeley, Berkeley, CA

  • Venue:
  • PARA'04 Proceedings of the 7th international conference on Applied Parallel Computing: state of the Art in Scientific Computing
  • Year:
  • 2004

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Abstract

Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are necessary in order to gain insights into the behavior of these devices. In this paper, we discuss two structure-preserving model-reduction techniques and apply them to the frequency-domain analysis of two proposed MEMS resonator designs.