Single-machine scheduling with advanced process control constraints

Authors:
Yiwei Cai;Erhan Kutanoglu;John Hasenbein;Joe Qin
Affiliations:
Freescale Semiconductor, Inc., Austin, USA 78721;Graduate Program in Operations Research and Industrial Engineering, Department of Mechanical Engineering, The University of Texas at Austin, Austin, USA 78712;Graduate Program in Operations Research and Industrial Engineering, Department of Mechanical Engineering, The University of Texas at Austin, Austin, USA 78712;The Mork Family Department of Chemical Engineering and Materials Science, Ming Hsieh Department of Electrical Engineering, Daniel J. Epstein Department of Industrial and Systems Engineering, Unive ...
Venue:
Journal of Scheduling
Year:
2012

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Abstract

With increasing worldwide competition, high technology manufacturing companies have to take great care to lower their production costs and guarantee high quality at the same time. Advanced process control (APC) is widely used in semiconductor manufacturing to adjust machine parameters so as to achieve satisfactory product quality. When there is a conflict between quality and scheduling objectives, quality usually takes precedence. This paper studies the interaction between scheduling and APC. A single-machine multiple-job-types makespan problem with APC constraints is proved to be NP-hard. For some special cases, optimal solutions are obtained analytically. In more general cases, the structure of optimal solutions is explored. An efficient heuristic algorithm based on these structural results is proposed and compared to an integer programming approach.