Digital Pattern Recognition by Moments
Journal of the ACM (JACM)
Automatic registration of scanning electron microscope images
Microelectronic Engineering
Morphological algorithms for visual analysis of integrated circuits
Journal of Visual Communication and Image Representation
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In this paper we describe some aspects of specifying, designing and evaluating a specialized machine, Romuald, for the capture, coding, and processing of video and scanning electron microscope (SEM) pictures. First we present the functional organization of the process unit of Romuald and its hardware, giving details of its behaviour. Then we study the capture and display unit which, thanks to its flexibility, enables SEM images coding. Finally we describe an application which is now being developed in our laboratory: testing VLSI circuits with new methods: SEM + voltage contrast and image processing).