3D reconstruction for a scanning electron microscope

Authors:
A. A. Zolotukhin;I. V. Safonov;K. A. Kryzhanovskii
Affiliations:
National Research Nuclear University MEPhi, Moscow, Russia 115409;National Research Nuclear University MEPhi, Moscow, Russia 115409;National Research Nuclear University MEPhi, Moscow, Russia 115409
Venue:
Pattern Recognition and Image Analysis
Year:
2013

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Abstract

An algorithm for the reconstruction of the 3D shape of the surface of a micro-object from a stereo pair of images obtained on a raster electron microscope (REM) has been considered. A model of building an image in REM has been presented. The SIFT algorithm was used for determination of the correspondence points. The correspondence points are used to determine the mutual position of the object in a stereo pair by the RANSAC method. A set of points is created in the 3D space, which is later interpolated to reconstruct the 3D surface.