Monitoring wafer map data from integrated circuit fabrication processes for spatially clustered defects

Authors:
Mark H. Hansen;Vijayan N. Nair;David J. Friedman
Affiliations:
-;-;-
Venue:
Technometrics
Year:
1997

Citing 0
Cited 2

Recognition of semiconductor defect patterns using spatial filtering and spectral clustering

Expert Systems with Applications: An International Journal
Separation of composite defect patterns on wafer bin map using support vector clustering

Expert Systems with Applications: An International Journal

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Abstract