Overview of microelectromechanical systems and design processes

Authors:
William C. Tang
Affiliations:
MEMS Technology Group, Jet Propulsion Laboratory Pasadena, California
Venue:
DAC '97 Proceedings of the 34th annual Design Automation Conference
Year:
1997

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Abstract

New design tools and automation strategies are neededto create robust, cost-effective, and manufacturable micro-machineddevices and systems. Some of the design automationissues include mixed-technology simulation, materialproperty prediction in the micron-size regime, self-consistencyin coupled electromechanical devices, integratedmodeling environment, micro-fluid modeling, and synthesisof device geometries and process flows. Advancement inthese areas will path the way to full-scale maturity of theMEMS field.