CAD and foundries for microsystems

  • Authors:

  • J. M. Karam;B. Courtois;H. Boutamine;P. Drake;A. Poppe;V. Szekely;M. Rencz;K. Hofmann;M. Glesner

  • Affiliations:

  • TIMA Lab., 46, Avenue Félix Viallet, 38031 GRENOBLE Cedex, France;TIMA Lab., 46, Avenue Félix Viallet, 38031 GRENOBLE Cedex, France;TIMA Lab., 46, Avenue Félix Viallet, 38031 GRENOBLE Cedex, France;Mentor Graphics, Rivergate, Newbury business Park, London Road, Newbury, Berkshire RG14 2QB, UK;Technical University of Budapest, Goldmann György tèr 3, 1521 Budapest, Hungary;Technical University of Budapest, Goldmann György tèr 3, 1521 Budapest, Hungary;Technical University of Budapest, Goldmann György tèr 3, 1521 Budapest, Hungary;Darmstadt University of Technology, Institute of Microelectronic Systems, Karlstrasse 15, 64283 Darmstadt, Germany;Darmstadt University of Technology, Institute of Microelectronic Systems, Karlstrasse 15, 64283 Darmstadt, Germany

  • Venue:
  • DAC '97 Proceedings of the 34th annual Design Automation Conference
  • Year:
  • 1997

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Abstract

Besides foundry facilities, Computer-Aided Design (CAD)tools are also required to move microsystems from researchprototypes to an industrial market. Currently available CADtools need extensions before they can be used for theautomated design of micromachined devices.This paper presents a low cost access to microsystemtechnology (MST), applied by the CMP service, and based onthe use of existing microelectronics production lines, withadditional post-processing for microsystem specific 2D and3D structures, and a global CAD approach for the design andsimulation of microsystems applied to currently availablecommercial CAD tools, e.g. Mentor Framework, in order toensure a continuous flow from the design to themanufacturing.