A CAD tool for optical MEMS

  • Authors:

  • Timothy P. Kurzweg;Steven P. Levitan;Philippe J. Marchand;Jose A. Martinez;Kurt R. Prough;Donald M. Chiarulli

  • Affiliations:

  • University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA;University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA;University of California, San Diego, ECE Dept., La Jolla, CA;University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA;University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA;University of Pittsburgh, Dept. of Computer Science, Pittsburgh, PA

  • Venue:
  • Proceedings of the 36th annual ACM/IEEE Design Automation Conference
  • Year:
  • 1999

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Abstract