Operational modeling and simulation in semiconductor manufacturing

• Authors:

• John W. Fowler;Michael C. Fu;Lee W. Schruben;Steven Brown;Frank Chance;Sean Cunningham;Courtland Hilton;Mani Janakiram;Rick Stafford;James Hutchby

• Affiliations:

• Dept. Ind./Mgmt. Sys. Eng., Arizona State University, Tempe, AZ;Van Munching Hall, University of Maryland, College Park, MD;School of OR/IE, Cornell University, Ithaca, NY;Siemens AG, HL MS, Balanstrasse 73, 81541 Munich, Germany;C2MS Productivity Solutions, 5852 Corte Margarita, Pleasanton, CA;Intel Corporation, 2200 Mission College Blvd., Santa Clara, CA;Intel Corporation, 5000 W. Chandler Blvd., Chandler, AZ;Motorola, ACT, 2200 West Broadway Rd, Mesa, AZ;Autosimulations, 655 Medical Drive, Bountiful, UT;SRC, P.O. Box 12053, R.T. Park, NC

• Venue:
• Proceedings of the 30th conference on Winter simulation
• Year:
• 1998