The broad sweep of integrated microsystems

Authors:
S. Tom Picraux;Paul J. McWhorter
Affiliations:
-;-
Venue:
IEEE Spectrum
Year:
1998

Citing 0
Cited 3

Hierarchical Mixed-Domain Circuit Simulation, Synthesis and Extraction Methodology for MEMS

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Generation of Electrically Induced Stimuli for MEMS Self-Test

Journal of Electronic Testing: Theory and Applications

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Abstract

Micromachining mechanical, chemical, and optical components onto the same wafers as electronic circuits produces powerful systems that can understand and influence their environments