Journal of Intelligent and Robotic Systems
A Neural Approach for the Control of Piezoelectric Micromanipulation Robots
Journal of Intelligent and Robotic Systems
Digital Image Processing
Smart Power Integrated Circuit for a Piezoelectric Miniature Robot
Analog Integrated Circuits and Signal Processing
Simulation-based scheduling of assembly operations
International Journal of Computer Integrated Manufacturing - THE CHALLENGES OF MANUFACTURING IN THE GLOBALLY INTEGRATED ECONOMY. GUEST EDITOR: ROBIN G. QIU
Micro-nano-integration based on automated serial assembly
CASE'09 Proceedings of the fifth annual IEEE international conference on Automation science and engineering
A four degree of freedom microrobot with large work volume
ICRA'09 Proceedings of the 2009 IEEE international conference on Robotics and Automation
Microassembly of complex and solid 3D MEMS by 3D vision-based control
IROS'09 Proceedings of the 2009 IEEE/RSJ international conference on Intelligent robots and systems
Parasitic effects on nanoassembly processes
IROS'09 Proceedings of the 2009 IEEE/RSJ international conference on Intelligent robots and systems
Autonomous robotic pick-and-place of microobjects
IEEE Transactions on Robotics
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A wide range of microcomponents can today be produced using various microfabrication techniques. The assembly of complex microsystems consisting of several single components (i.e., hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast microassembly methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm^3 and with at least 5 DOF can perform various manipulations either under a light microscope or within the vacuum chamber of a scanning electron microscope. The components of the station developed and its control system are described. The latter comprises a vision-based sensor system for automatic robot control, user interfaces, a re-configurable parallel computer array and an assembly planning system. Specific problems that occur when using microrobots in an SEM and our research activities on the development of force microsensors integrated into the microrobots" grippers are described as well.