Fitting Parameterized Three-Dimensional Models to Images
IEEE Transactions on Pattern Analysis and Machine Intelligence
A Flexible Microrobot-Based Microassembly Station
Journal of Intelligent and Robotic Systems
Real-Time Visual Tracking of Complex Structures
IEEE Transactions on Pattern Analysis and Machine Intelligence
A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication
Journal of Intelligent and Robotic Systems
Real-Time Markerless Tracking for Augmented Reality: The Virtual Visual Servoing Framework
IEEE Transactions on Visualization and Computer Graphics
An ultraprecision six-axis visual servo-control system
IEEE Transactions on Robotics
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This paper describes the vision-based methods developed for assembly of complex and solid 3D MEMS (micro electromechanical systems) structures. The microassembly process is based on sequential robotic operations such as planar positioning, gripping, orientation in space and insertion tasks. Each of these microassembly tasks is performed using a pose-based visual control. To be able to control the microassembly process, a 3D model-based tracker is used. This tracker is able to directly provide the 3D micro-object pose at real-time and from only a single view of the scene. The methods proposed in this paper are validated on an automatic assembly of fives silicon microparts of 400 µm × 400 µm × 100 mm on 3-levels. The insertion tolerance (mechanical play) is estimated to 3 µm. The precision of this insertion tolerance allows us to obtain solid and complex micro electromechanical structures without any external joining (glue, wending. Promising positioning and orientation accuracies are obtained who can reach 0.3 µm in position and 0.2° in orientation.