Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision

  • Authors:
  • M. Tichem;M. S. Cohen

  • Affiliations:
  • -;-

  • Venue:
  • IEEE Transactions on Pattern Analysis and Machine Intelligence
  • Year:
  • 1994

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Abstract

Sub/spl mu/m registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies.