The P300: a system for automatic patterned wafer inspection

Authors:
Byron E. Dom;Virginia Brecher;Raymond Bonner;John S. Batchelder;Robert S. Jaffe
Affiliations:
IBM, San Jose, CA;IBM T. J. Watson Research Center, Yorktown Heights, NY;IBM T. J. Watson Research Center, Yorktown Heights, NY;IBM T. J. Waton Research Center, Yorktown Heights, NY;IBM T. J. Watson Research Center, Yorktown Heights, NY
Venue:
Machine Vision and Applications
Year:
1988

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Abstract