Genetic Algorithms in Search, Optimization and Machine Learning
Genetic Algorithms in Search, Optimization and Machine Learning
| Hi-index | 0.00 |
We propose a new design concept for controlling the deflection of a micro-membrane with the aid of its thickness distribution for realizing a prescribed design in the MEMS. As an example, we treat a micro air pump that comprises a micro-membrane. The membrane is actuated by an electrostatic force. The membrane deflects and thus the deflection is influenced by the air pressure and the electrostatic field. This is a highly complicated system. To find out a proper thickness distribution, we use the genetic algorithm that is appropriate to reduce the searching space of solution.