A 16-bit mixed-signal microsystem with integrated CMOS-MEMS clock reference

  • Authors:
  • Robert M. Senger;Eric D. Marsman;Michael S. McCorquodale;Fadi H. Gebara;Keith L. Kraver;Matthew R. Guthaus;Richard B. Brown

  • Affiliations:
  • University of Michigan, Ann Arbor, Michigan;University of Michigan, Ann Arbor, Michigan;University of Michigan, Ann Arbor, Michigan;University of Michigan, Ann Arbor, Michigan;University of Michigan, Ann Arbor, Michigan;University of Michigan, Ann Arbor, Michigan;University of Michigan, Ann Arbor, Michigan

  • Venue:
  • Proceedings of the 40th annual Design Automation Conference
  • Year:
  • 2003

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Abstract

In this work, we report on an unprecedented design where digital, analog, and MEMS technologies are combined to realize a general-purpose single-chip CMOS microsystem. The convergence of these technologies has enabled the development of a low power, portable microinstrument ideally suited for controlling environmental and bio-implantable sensors.