A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14µm DRAM Generation and Beyond

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ISQED '02 Proceedings of the 3rd International Symposium on Quality Electronic Design
Year:
2002

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CAD for nanometer silicon design challenges and success

IEEE Transactions on Very Large Scale Integration (VLSI) Systems - Nanoelectronic circuits and systems

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Abstract