Failure modes for stiction in surface-micromachined MEMS
ITC '98 Proceedings of the 1998 IEEE International Test Conference
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An economical IMEMS accelerometer test lab wasdeveloped by adding acceleration stimulation equipment toan IC test lab. This paper will describe an R&D approachto testing these accelerometers. Descriptions and usage ofthe equipment are presented. Accelerometer pulse streamdata and their analysis are described. A production testfacility is being developed from this work.