Proceedings of the third Europeon workshop on Materials for advanced metallization
A selective CMP process for stacked low-k CVD oxide films
Proceedings of the third Europeon workshop on Materials for advanced metallization
Integration challenges of porous ultra low-k spin-on dielectrics
Microelectronic Engineering
Effect of mechanical process parameters on chemical mechanical polishing of al thin films
Microelectronic Engineering
Investigation on the final polishing slurry and technique of silicon substrate in ULSI
Microelectronic Engineering
Microelectronic Engineering - Proceedings of the European workshop on materials for advanced metallization 2004
Microelectronic Engineering
Defect detection on semiconductor wafer surfaces
Microelectronic Engineering
Integration of thin film bulk acoustic resonators onto flexible liquid crystal polymer substrates
Microelectronic Engineering
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In recent years, polymeric materials such as polycarbonate (PC) and poly methyl methacrylate (PMMA) are replacing silicon as major substrates in microfluidic system fabrication due to the outstanding features like low cost and good chemical resistance. In this study, chemical mechanical polishing (CMP) of PC and PMMA substrates was investigated. First, four types of slurry were tested. Then, the slurry producing relatively high material removal rate (MRR) and low surface roughness was chosen, and experiments were designed and carried out to investigate the effects of key process parameters. The experimental results show impacts of key CMP process parameters on MRR and surface finish of PC and PMMA substrates. An increase in head load or table speed would cause an increase in surface roughness heights and MRR. The surface quality of the polymers after CMP appeared to be acceptable for most of microelectromechanical system applications as the process conditions were restrained within the process window.