LotTrack: RFID-Based Process Control in the Semiconductor Industry

Authors:
Frederic Thiesse;Markus Dierkes;Elgar Fleisch
Affiliations:
University of St. Gallen;Intellion;University of St. Gallen
Venue:
IEEE Pervasive Computing
Year:
2006

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Abstract

Besides its economic potential to optimize the efficiency of object identification tasks, RFID can also increase the visibility of physical product flows and thus improve the planning of logistics and production processes. The case of Infineon Technologies illustrates the benefits of RFID for inbound logistics in wafer fabrication. The authors describe LotTrack, a real-time identification and localization system that uses active RFID, passive RFID, and ultrasound sensorsto track production lots in the fabrication cleanroom. LotTrack combines the efficiency of process automation with the flexibility of manual production and leads to complete transparency in manufacturing scenarios that had previously been hardly controllable. In practical use, the system has led to better machine utilization as well as drastically reduced lead times and fault rates.This article is part of a special issue on RFID Technology.