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Middle-term perspectives of process-device technology of semiconductor integrated circuits are described. Even though Moore's law is generally considered to hold good for 10-15 years more, many of the current technologies are foreseen to face growth limitations and thus undergo innovative changes. Problems and possible breakthroughs are discussed for lithography, transistor size, interconnections and power dissipation as the principal factors of such limitations. Future directions to expand functionality and performance of integrated circuits are also described.