A new method to determine the tool count of a semiconductor factory using FabSim

  • Authors:
  • Holger Vogt

  • Affiliations:
  • Fraunhofer IMS, Duisburg, Germany

  • Venue:
  • WSC '04 Proceedings of the 36th conference on Winter simulation
  • Year:
  • 2004

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Abstract

Tool count optimization is mandatory for an efficiently organized semiconductor factory. This paper describes an efficient heuristic to determine the tool count using the compact fab simulator FabSim Interactive. A combination of the Simulated Annealing algorithm and the knowledge of toolset usage, which is gained by repeated simulation of the factory, results in a fast approach. There are no restrictions concerning multiple products and processes during optimization. A simple cost model (revenue per wafer out minus tool depreciation) yields the objective function to be maximized, tool count values per toolset are the decision variables, and a lot start sequence determines the fab throughput required. Depending on the factory size, optimization results may be available within a few hours of simulation time on a standard PC.