Effective simulation model reuse: a case study for AMHS modeling
Proceedings of the 30th conference on Winter simulation
Wafer fabrication: 300mm wafer fabrication line simulation model
Proceedings of the 34th conference on Winter simulation: exploring new frontiers
Proceedings of the 35th conference on Winter simulation: driving innovation
Capacity analysis of automated material handling systems in semiconductor fabs
WSC '04 Proceedings of the 36th conference on Winter simulation
A case study of model context for simulation composability and reusability
WSC '05 Proceedings of the 37th conference on Winter simulation
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The transition to 300mm wafer size introduced a lot of new technologies to wafer fabrication facilities that mandated the presence of intrabay automated material handling systems (AMHS) for moving wafer carriers between the stockers and production tools within a bay. The design of intrabay AMHS depends on the configuration and the mode of delivery. A generic reusable tool is developed for modeling and simulation of the 300mm intrabay AMHS different designs. The tool relies on a built-in database and a library containing the different components of intrabay AMHS and the different processing tools. The design of the generic tool guarantees its reusability for building different models of bays with virtually any design. The tool output includes a number of AMHS performance metrics that can be used effectively in comparing different designs of an intrabay AMHS.