Process and material handling models integration
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 2
Proceedings of the 35th conference on Winter simulation: driving innovation
Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation
Proceedings of the 35th conference on Winter simulation: driving innovation
A Continuum Model for a Re-entrant Factory
Operations Research
Simulation framework for complex manufacturing systems with automated material handling
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Survey of research in modeling conveyor-based automated material handling systems in wafer fabs
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Reusable tool for 300mm intrabay AMHS modeling and simulation
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
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The importance of semiconductor wafer fabrication has been increasing steadily over the past decade. Wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. It involves the processing of wafers of silicon in order to build up layers and patterns of metal and wafer material. Many operations have to be performed in a clean room environment to prevent particulate contamination of wafers. Also, since the machines on which the wafers are processed are expensive, service contention is an important concern. All these factors underline the importance of seeking policies to design and operate them efficiently. We describe a simulation model of a planned 300mm wafer fabrication line that we are using to make strategic decisions related to the factory.