On the corrupting influence of variability in semiconductor manufacturing
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
Wafer fabrication: effects of metrology load port buffering in automated 300mm factories
Proceedings of the 34th conference on Winter simulation: exploring new frontiers
Wafer fabrication: 300mm wafer fabrication line simulation model
Proceedings of the 34th conference on Winter simulation: exploring new frontiers
WSC '04 Proceedings of the 36th conference on Winter simulation
Capacity analysis of automated material handling systems in semiconductor fabs
WSC '04 Proceedings of the 36th conference on Winter simulation
An analytical model for conveyor based amhs in semiconductor wafer fabs
Proceedings of the 40th Conference on Winter Simulation
A greedy heuristic for locating crossovers in conveyor-based AMHS in wafer fabs
Winter Simulation Conference
Modeling and wafer defect analysis in semiconductor automated material handling systems
Proceedings of the Winter Simulation Conference
Event-based recognition and source identification of transient tailbacks in manufacturing plants
Proceedings of the Winter Simulation Conference
Simulating conveyor-based AMHS layout configurations in small wafer lot manufacturing environments
Proceedings of the Winter Simulation Conference
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Automated material handling systems (AMHS) play a central role in modern wafer fabrication facilities (fabs). Typically, AMHS used in wafer fabs are based on discrete vehicle-based overhead systems such as overhead hoisted vehicles. Conveyor-based continuous flow transport (CFT) implementations are starting to gain support with the expectations that CFT systems will be capable of handling high-volume manufacturing transport requirements. This paper discusses literature related to models of conveyor systems in semiconductor fabs. A comprehensive overview of simulation-based models is provided. We also identify and discuss specific research problems and needs in the design and control of closed-loop conveyors. It is concluded that new analytical and simulation models of conveyor systems need to be developed to understand the behavior of such systems and bridge the gap between theoretical research and industry problems.