A model of a 300mm wafer fabrication line
Proceedings of the 31st conference on Winter simulation: Simulation---a bridge to the future - Volume 1
Proceedings of the 32nd conference on Winter simulation
Proceedings of the 32nd conference on Winter simulation
Survey of research in modeling conveyor-based automated material handling systems in wafer fabs
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Reusable tool for 300mm intrabay AMHS modeling and simulation
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
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A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.