Robot vision
IEEE Transactions on Pattern Analysis and Machine Intelligence
Visual Servoing for Micro-Manipulation
ICPR '96 Proceedings of the International Conference on Pattern Recognition (ICPR '96) Volume III-Volume 7276 - Volume 7276
An ultraprecision six-axis visual servo-control system
IEEE Transactions on Robotics
Visually Servoed 3-D Alignment of Multiple Objects with Subnanometer Precision
IEEE Transactions on Nanotechnology
Actively controlled manipulation of a magnetic microbead using quadrupole magnetic tweezers
IEEE Transactions on Robotics
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This paperpresents a three-axis vision motion sensor and its applications to visual servo control. The vision sensor is integrated with a three-axis piezo stage to form a visual servo control system that achieves nanometer resolution in all three x- y-z motion axes. Motion measurement is achieved using a single interferometer-equipped optical microscope. A real-time imageprocessing algorithm that processes interference fringe patterns and that achieves nanometer out-of-plane resolution is presented. Furthermore, a feedback-control scheme is introduced to control the sensor plane using an Objective-Z-Positioner to enable automatic tracking of moving objects. It expands the out-of-plane measurement range of the vision sensor beyond its inherent depth of field of several micrometers to 100 µm and beyond. An integrated visual servo system is implemented and experimental results are shown.