3D position detection with an FIB-SEM dual beam system

Authors:
Robert Tunnell;Sergej Fatikow
Affiliations:
University of Oldenburg, Division Microrobotics and Control Engineering, Oldenburg, Germany;University of Oldenburg, Division Microrobotics and Control Engineering, Oldenburg, Germany
Venue:
ACELAE'11 Proceedings of the 10th WSEAS international conference on communications, electrical & computer engineering, and 9th WSEAS international conference on Applied electromagnetics, wireless and optical communications
Year:
2011

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Abstract

The handling and characterization of nanoobjects has gained in importance in recent years. The scanning electron microscope (SEM) in combination with a focus ion beam (FIB) is commonly used. These applications often need the positions of involved objects. The position calculation must be precise and able to offer results in real time. This paper introduces a new 3D position detection approach for FIB-SEM dual beam systems. FIB and SEM are combined to a powerful stereo system with accuracy in the lower nm range. The FIB is used with low powers to avoid unintended abrasion. In addition to results and the proof of concept an overview of future challenges is given.